SIS 系统卡件TRICONEX 9563-810
将设计好的程序写入PLC后，首先逐条仔细检查，并改正写入时出现的错误。用户程序一般先在实验室模拟调试，实际的输入信号可以用钮子开关和按钮来模拟，各输出量的通/断状态用PLC上有关的发光二极管来显示，一般不用接PLC实际的负载(如接触器、电磁阀等)。可以根据功能表图，在适当的时候用开关或按钮来模拟实际的反馈信号，如限位开关触点的接通和断开。
对于顺序控制程序，调试程序的主要任务是检查程序的运行是否符合功能表图的规定，即在某一转换条件实现时，是否发生步的活动状态的正确变化，即该转换所有的前级步是否变为不活动步，所有的后续步是否变为活动步，以及各步被驱动的负载是否发生相应的变化。
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AMAT Applied Materials 0190-27313 Capacitance Pirani Gauge Used Working
SMC PF2W720T-04-27 Digital Flow Switch INA-24-73-04 Valve AMAT 0190-13951 New
Brooks Automation T1102-01-290-14 Cryogenic Refrigeration AMAT 0190-A8780 As-Is
Shimadzu 262-78189-51V1 Turbomolecular Pump Cable 262-76411-51V2 AMAT 0620-02820
Mass-Vac 355084 MV Multi-Trap Vacuum AMAT 0190-34121 Used
Entegris 4210-060G-F04-B?12-B-P1-U1 NT Pressure Transducer AMAT 1350-00400
Entegris 4210-100G-W04-X?XX-C-P1-U1 NT Pressure Transducer AMAT 1350-00456 New
Entegris 4210-060G-F04-B?12-B-P1-U1 NT Pressure Transducer AMAT 1350-00400 New
Mass-Vac 355084 MV Multi-Trap Vacuum AMAT 0190-34121 with Heater Jacket Used
Shimadzu 262-78462-51V1 Turbopump Cable Set 262-76411-51V1 AMAT 0190-17036 New
SMC VV5Q11-08-DAM01?086 Pneumatic Manifold AMAT 0190-32494 New
MDC KIV-150-P-51892?PC Inline Angle Valve AMAT 0190-40016 Used
V250 Varian 9699007S024 Turbo Pump Macro Torr AMAT 70404190100 As-Is
Shimadzu 262-78187-56V1 Turbopump Cable AMAT 0620-03167 TMP303 New
Horiba STEC D214-SCU Digital Mass Flow Module AMAT 0190-31926 Lot of 2
Celerity BBYLUA00 Mass Flow Controller IN3XP AMAT 3030-15193 Untested
Horiba STEC SEC-V110DM Digital Mass Flow Controller AMAT 3030-14383 Lot of 2
Celerity AAPGD40W1 Mass Flow Controller IN3XP AMAT 0190-19977 CH2F2 Lot of 2
Shimadzu 262-78462-51V1 Turbopump Cable 10 foot AMAT 0620-03520 New
Alcatel ACT 1300 M Turbopump Controller AMAT 3930-01149 Tested Not Working
Shimadzu 262-78782-22 Turbo Molecular Pump Cable EI-D3403M AMAT 3620-00508 New
Brooks Instruments 1358E1D1EA1A1A Gas Flow Meter AMAT 1040-01021 Lot of 7 Used
SKF MB340-816-0031-?002 Turbo Molecular Pump Controller AMAT 0190-24282 Tested
Leybold TURBOVAC 340M Turbopump 85582 AMAT 3620-00338 Untested As-Is
Leybold NT 340 MA Turbopump Controller 85732 AMAT 0730-01040 Used Tested Working
SMC XLA160-30-1-M9B?A Pneumatic High Vacuum Angle Valve AMAT 0090-01100 Working
PM-6 VAT 650PM-24JG-ADK1 Adaptive Pressure Controller AMAT 0190-25901 New
Shimadzu EI-3203MD-A1 TMP Turbopump Power Unit AMAT 3620-01616 Tested Working
Shimadzu EI-D3603M Turbo Molecular Pump Controller AMAT 0010-32353 Working
ET300WS Ebara Turbo-Molecular Pump AMAT 3620-01536 Not Working As-Is
Alcatel ACT 1300 M Turbopump Controller Type 109670 AMAT 3620-00273 Used Working
Alcatel ATH 1600 MT Vacuum Turbopump P65621B2 AMAT 3620-00192 Needs Rebuild
Shimadzu EI-D3403MT (A1) (SP65) Turbo Controller AMAT 0190-19088 New Surplus
Shimadzu EI-D3603M Turbo Molecular Pump Controller AMAT 0010-32353 New Surplus
Alcatel ATH 1600 M Vacuum Turbopump P25621B1 AMAT 3620-00182 Needs Rebuild
Alcatel ATH 1600 M Vacuum Turbopump P2562121 AMAT 3620-00091 Needs Rebuild As-Is
Alcatel Adixen A100V111322 Dry Vacuum Pump A100V AMAT 3620-00566 As-Is
Alcatel ACT 1300 M Turbopump Controller Type 9097 AMAT 3930-01149 New
Alcatel 9097 Turbopump Controller ACT 1300 M AMAT 3930-01149 Tested Used Working
Leybold 12132 Turbo Molecular Pump MAGW2010C AMAT 3620-01573 Tested Working
IPUP A100L Alcatel A100 Dry Vacuum Pump AMAT 0190-01042 Used Working
Alcatel ATH 1600 M Vacuum Turbopump P65621B2 AMAT 3620-00192 Needs Rebuild
Alcatel ATH 1600 M Vacuum Turbopump P2562121 AMAT 3620-00091 Chip on Rotor As-Is
