SIS系统卡9662-610
将设计好的程序写入PLC后，首先逐条仔细检查，并改正写入时出现的错误。用户程序一般先在实验室模拟调试，实际的输入信号可以用钮子开关和按钮来模拟，各输出量的通/断状态用PLC上有关的发光二极管来显示，一般不用接PLC实际的负载(如接触器、电磁阀等)。可以根据功能表图，在适当的时候用开关或按钮来模拟实际的反馈信号，如限位开关触点的接通和断开。
对于顺序控制程序，调试程序的主要任务是检查程序的运行是否符合功能表图的规定，即在某一转换条件实现时，是否发生步的活动状态的正确变化，即该转换所有的前级步是否变为不活动步，所有的后续步是否变为活动步，以及各步被驱动的负载是否发生相应的变化。
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Unit UFC-1100 Mass Flow Controller AMAT 3030-01683 3 SLM O2 Lot of 2
Celerity IFC-125C Mass Flow Controller 10 SCCM SiCl4 AMAT 0190-28857 Lot of 2
Celerity IFC-125C Mass Flow Controller 12000 SCCM H2 AMAT 0190-28862 Lot of 2
Unit UFC-1660 Metal Seal Mass Flow Controller 40 L N2 AMAT 3030-12923 Lot of 2
Unit UFC-8165 Digital UltraClean Metal Seal 10 L Ar AMAT 3030-03621 Lot of 2
Celerity UFC-8565C Digital UltraClean Metal Seal AMAT 0190-16332 Lot of 2
Unit UFC-1100A Mass Flow Controller AMAT 3030-02494 200 SCCM NF3 Lot of 2
Horiba STEC SEC-V110DM Digital Mass Flow Controller AMAT 3030-14383 Lot of 2
Celerity IFC-125C Mass Flow Controller AMAT 0190-28861 MultiFlo SC26 Lot of 2
Celerity IFC-125C Mass Flow Controller 5000 SCCM NF3 AMAT 0190-28862 Lot of 2
Celerity IFC-125C Mass Flow Controller 18000 SCCM H2 AMAT 0190-28862 Lot of 2
Celerity UFC-1661 Digital Metal Seal AMAT 3030-15049 Lot of 2 Untested
Unit UFC-1100A Mass Flow Controller AMAT 3030-01077 10 SLM N2 Lot of 2 As-Is
Unit UFC-1260A Mass Flow Controller AMAT 3030-01644 100 SCCM N2 Lot of 2 As-Is
Mykrolis FC-2902MEP5-T Mass Flow Controller AMAT 3030-04248 Lot of 2 As-Is
Mykrolis FC-2902MEP5-T Mass Flow Controller AMAT 3030-04246 Lot of 2 As-Is
Tylan FC-2900MEP5 Mass Flow Controller AMAT 3030-06161 Lot of 2 As-Is
Tylan FC-2900MEP5 Mass Flow Controller AMAT 3030-09062 Lot of 2 As-Is
Tylan FC-2952MEP5-T Mass Flow Controller AMAT 3030-04112 Lot of 2 As-Is
Tylan FC-2952MEP5-T Mass Flow Controller AMAT 3030-07682 Lot of 2 As-Is
Tylan FC-2950MEP5 Mass Flow Controller AMAT 3030-06009 Lot of 2 As-Is
Tylan FC-2950MEP5 Mass Flow Controller AMAT 0224-40774 Lot of 2 As-Is
Tylan FC-2951MOEP5 Mass Flow Controller AMAT 3030-04203 Lot of 2 As-Is
Tylan FC-2900MEP5 Mass Flow Controller AMAT 0227-97999 Lot of 2 As-Is
Tylan FC-2952MEP5-T Mass Flow Controller AMAT 0227-12393 Lot of 2 As-Is
Millipore FC-2900MEP5 Mass Flow Controller AMAT 3030-04733 Lot of 2 As-Is
Unit Instruments UFC-1100A Mass Flow Controller AMAT 3030-02147 Lot of 2 As-Is
Celerity UFC-8165 Mass Flow Controller AMAT 3030-14773 Lot of 2 As-Is
