SIS卡件9662-610
将设计好的程序写入PLC后，首先逐条仔细检查，并改正写入时出现的错误。用户程序一般先在实验室模拟调试，实际的输入信号可以用钮子开关和按钮来模拟，各输出量的通/断状态用PLC上有关的发光二极管来显示，一般不用接PLC实际的负载(如接触器、电磁阀等)。可以根据功能表图，在适当的时候用开关或按钮来模拟实际的反馈信号，如限位开关触点的接通和断开。
对于顺序控制程序，调试程序的主要任务是检查程序的运行是否符合功能表图的规定，即在某一转换条件实现时，是否发生步的活动状态的正确变化，即该转换所有的前级步是否变为不活动步，所有的后续步是否变为活动步，以及各步被驱动的负载是否发生相应的变化。
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Celerity UFC-8165 Mass Flow Controller AMAT 3030-12869 100cc WF6 As-Is
Tylan FC-2900MEP Mass Flow Controller AMAT 3030-02225 300 SCCM N2 As-Is
Tylan FC-2900MEP5 Mass Flow Controller AMAT 0227-38622 20 SCCM 70%HE/30%O2 As-Is
Tylan FC-2900MEP5 Mass Flow Controller AMAT 3030-04730 20 SCCM HE As-Is
Tylan FC-2950MEP5-T Mass Flow Controller AMAT 3030-06009 50 SCCM HBr As-Is
Tylan FC2900MEP5 4V Mass Flow Controller AMAT 3030-04845 500 SCCM O2 Used
Tylan FC-2952MEP5-T Mass Flow Controller AMAT 0227-39109 200 SCCM N2 As-Is
Tylan FC-2952MEP5-T Mass Flow Controller AMAT 3030-04137 10 SCCM O2 As-Is
Tylan FC-2951MEP5 Mass Flow Controller AMAT 0227-46755 200 SCCM SiH4 As-Is
Tylan FC-2900MEP5-4V Mass Flow Controller AMAT 3030-05787 10 SCCM O2 As-Is
Tylan FC-2900MEP Mass Flow Controller AMAT 3030-06428 5 SLPM Ar As-Is
Millipore FC-2900MEP5 Mass Flow Controller AMAT 3030-00299 100 SCCM BCL3 As-Is
Millipore FC-2900MEP5 Mass Flow Controller AMAT 3030-04726 200 SCCM Ar As-Is
Millipore FC-2900M Mass Flow Controller AMAT 3030-05429 5 SLPM N2 Used
Millipore FC-2900MEP Mass Flow Controller AMAT 3030-04858 100 SCCM NF3 As-Is
Millipore FC-2952MEP5-T Mass Flow Controller AMAT 3030-04126 100 SCCM C2F6 As-Is
Millipore FC-2900MEP-4V Mass Flow Controller AMAT 0225-98618 100 SCCM CHF3 As-Is
Millipore FC-2900MEP5 Mass Flow Controller AMAT 3030-04986 200 SCCM HBR As-Is
Millipore FC-2900MEP5 Mass Flow Controller AMAT 3030-04984 200 SCCM CL2 As-Is
Tylan FC-2900MEP5 Mass Flow Controller AMAT 3030-05695 200 SCCM He As-Is
Tylan FC-2952MEP5 Mass Flow Controller AMAT 3030-04729 200 SCCM SF6 As-Is
Tylan FC-2950MEP5 Mass Flow Controller AMAT 3030-04729 200 SCCM SF6 As-Is
Tylan FC-2900MEP-L Mass Flow Controller AMAT 0227-06166 10 SCCM O2 As-Is
Tylan FC-2900MEP5 Mass Flow Controller AMAT 3030-04729 100 SCCM SF6 As-Is
Millipore FC-2902MEP5-T Mass Flow Controller AMAT 3030-00559 5 SLPM N2 As-Is
Mykrolis AAKGD40W1 Digital Mass Flow Controller AMAT 0190-19973 18 SCCM N2 Used
Celerity IFC-125C Mass Flow Controller AMAT 0190-28860-01 MultiFlow SC25 Used
Celerity IFC-125C Mass Flow Controller AMAT 0190-26051 MultiFlo SC27 Used
Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-12079 Used
Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-10990 Used
Celerity IFC-125C Mass Flow Controller AMAT 0190-28963 MultiFlo SC26 Used
Celerity IFC-125C Mass Flow Controller AMAT 0190-26052 Multiflo SC28 Used
Celerity IFC-125C Mass Flow Controller AMAT 0190-28856 MultiFlo SC21 Used
Celerity UFC-8165 Mass Flow Controller AMAT 0190-24840 3L NF3 Used
Celerity IFC-125C Mass Flow Controller AMAT 0190-28958 MultiFlo SC21 Used
Millipore FC-2900MEP5-4V Mass Flow Controller AMAT 0227-01643 50 SCCM SF6 Used
Unit Instruments UFC-8165 Mass Flow Controller AMAT 3030-00519 30L N2 Used
Unit Instruments UFC-3165 Mass Flow Controller AMAT 3030-03331 Used
Celerity AASGD40W1 Mass Flow Controller AMAT 0190-19979 859-2188 SCCM N2 Used
Celerity AANGD40W1 Mass Flow Controller AMAT 0190-19976 45 SCCM NF3 Used
Millipore FC-2900MEP5 Mass Flow Controller AMAT 3030-04733 50 SCCM CF4 Used
Millipore FSDGD100GM00 Mass Flow Controller AMAT 3030-00931 100 SCCM NF3 Used
Millipore FSDGD100D800 Mass Flow Controller AMAT 3030-00939 200 SCCM O2 Used
Millipore FSEGD100CF00 Mass Flow Controller AMAT 3030-09784 400 SCCM CF4 Used
Millipore FSEGD100JR00 Mass Flow Controller AMAT 3030-03079 1500 SCCM Ar Used
Celerity UFC-8565 Mass Flow Controller AMAT 3030-10579 2L Ar
Mykrolis DSMAE1XM Mass Flow Controller AMAT 3030-14330 20 SCCM O2 Used
Millipore FSDGD100UP00 Mass Flow Controller AMAT 3030-10028 Used
Millipore FSEGD1000W00 Mass Flow Controller AMAT 3030-00831 200 SCCM SF6 Used
Millipore FSDGD100LG00 Mass Flow Controller AMAT 3030-03271 200 SCCM CH2F2 Used
Millipore FSDGD1000R00 Mass Flow Controller AMAT 3030-00822 400 SCCM CL2 Used
Millipore FSDGD100BJ00 Mass Flow Controller AMAT 3030-00821 200 SCCM BCL3 Used
Celerity DSNRD100 Mass Flow Controller AMAT 3030-13509 150 SCCM Ar Used
